VLSI Wiki
Contents:
  1. 3D IC Design
    1. 1. Definition: What is 3D IC Design?
    2. 2. Components and Operating Principles
      1. 2.1 (Optional) Subsections
    3. 3. Related Technologies and Comparison
    4. 4. References
    5. 5. One-line Summary

3D IC Design

1. Definition: What is 3D IC Design?

3D IC Design๋Š” ๋ฐ˜๋„์ฒด ์ง‘์  ํšŒ๋กœ๋ฅผ ์ˆ˜์ง์ ์œผ๋กœ ์Œ“์•„ ์˜ฌ๋ฆฌ๋Š” ๊ธฐ์ˆ ๋กœ, ์—ฌ๋Ÿฌ ๊ฐœ์˜ ํšŒ๋กœ์ธต์„ ํ•˜๋‚˜์˜ ์นฉ์œผ๋กœ ํ†ตํ•ฉํ•˜์—ฌ ์„ฑ๋Šฅ๊ณผ ๋ฐ€๋„๋ฅผ ๊ทน๋Œ€ํ™”ํ•˜๋Š” ๊ฒƒ์„ ๋ชฉํ‘œ๋กœ ํ•ฉ๋‹ˆ๋‹ค. ์ด ๊ธฐ์ˆ ์€ ์ „ํ†ต์ ์ธ 2D IC ์„ค๊ณ„์—์„œ ๋ฒ—์–ด๋‚˜, ๊ณต๊ฐ„ ํ™œ์šฉ๋„๋ฅผ ๋†’์ด๊ณ  ์ „๋ ฅ ์†Œ๋น„๋ฅผ ์ค„์ด๋ฉฐ ๋ฐ์ดํ„ฐ ์ „์†ก ์†๋„๋ฅผ ํ–ฅ์ƒ์‹œํ‚ค๋Š” ๋ฐ ์ค‘์š”ํ•œ ์—ญํ• ์„ ํ•ฉ๋‹ˆ๋‹ค. 3D IC๋Š” ํŠนํžˆ VLSI (Very Large Scale Integration) ์‹œ์Šคํ…œ์—์„œ ์ค‘์š”ํ•œ ๊ธฐ์ˆ ๋กœ ์ž๋ฆฌ ์žก๊ณ  ์žˆ์œผ๋ฉฐ, ๋ณต์žกํ•œ Digital Circuit Design์„ ํ•„์š”๋กœ ํ•˜๋Š” ์‘์šฉ ํ”„๋กœ๊ทธ๋žจ์—์„œ ๊ทธ ์ค‘์š”์„ฑ์ด ๋”์šฑ ๋ถ€๊ฐ๋˜๊ณ  ์žˆ์Šต๋‹ˆ๋‹ค.

3D IC Design์˜ ์ฃผ์š” ํŠน์ง• ์ค‘ ํ•˜๋‚˜๋Š” ๋‹ค์–‘ํ•œ ์ธต์˜ ํšŒ๋กœ๊ฐ€ ์„œ๋กœ ์—ฐ๊ฒฐ๋˜์–ด ์žˆ๋‹ค๋Š” ์ ์ž…๋‹ˆ๋‹ค. ์ด๋Š” Through-Silicon Via (TSV)์™€ ๊ฐ™์€ ๊ธฐ์ˆ ์„ ํ†ตํ•ด ์ด๋ฃจ์–ด์ง€๋ฉฐ, ๊ฐ ์ธต ๊ฐ„์˜ ๋ฐ์ดํ„ฐ ์ „์†ก์„ ๊ฐ€๋Šฅํ•˜๊ฒŒ ํ•ฉ๋‹ˆ๋‹ค. ์ด๋Ÿฌํ•œ ์ˆ˜์ง์  ์—ฐ๊ฒฐ์€ ์‹ ํ˜ธ์˜ ์ง€์—ฐ ์‹œ๊ฐ„์„ ์ค„์ด๊ณ , ๋” ๋†’์€ Clock Frequency๋ฅผ ์ง€์›ํ•  ์ˆ˜ ์žˆ๊ฒŒ ํ•ด์ค๋‹ˆ๋‹ค. ๋˜ํ•œ, 3D IC๋Š” ์—ด ๊ด€๋ฆฌ์™€ ์ „๋ ฅ ๋ถ„๋ฐฐ ์ธก๋ฉด์—์„œ๋„ ์œ ๋ฆฌํ•œ ์ ์ด ๋งŽ์•„, ๊ณ ์„ฑ๋Šฅ ์ปดํ“จํŒ… ๋ฐ ๋ชจ๋ฐ”์ผ ๊ธฐ๊ธฐ์—์„œ์˜ ์‘์šฉ์ด ํ™œ๋ฐœํžˆ ์ด๋ฃจ์–ด์ง€๊ณ  ์žˆ์Šต๋‹ˆ๋‹ค.

์ด๋Ÿฌํ•œ ๊ธฐ์ˆ ์€ ๋˜ํ•œ ์‹œ์Šคํ…œ์˜ ์ „์ฒด์ ์ธ ์„ฑ๋Šฅ์„ ํ–ฅ์ƒ์‹œํ‚ค๋Š” ๋ฐ ๊ธฐ์—ฌํ•ฉ๋‹ˆ๋‹ค. ์˜ˆ๋ฅผ ๋“ค์–ด, 3D IC Design์„ ํ†ตํ•ด ๋ฉ”๋ชจ๋ฆฌ์™€ ํ”„๋กœ์„ธ์„œ๋ฅผ ๊ฐ€๊นŒ์ด ๋ฐฐ์น˜ํ•จ์œผ๋กœ์จ ๋ฐ์ดํ„ฐ ์ „์†ก ๊ฑฐ๋ฆฌ๋ฅผ ์ค„์ด๊ณ , ๊ฒฐ๊ณผ์ ์œผ๋กœ ๋Œ€์—ญํญ์„ ์ฆ๊ฐ€์‹œํ‚ฌ ์ˆ˜ ์žˆ์Šต๋‹ˆ๋‹ค. ์ด์™€ ๊ฐ™์€ ์ด์œ ๋กœ, 3D IC Design์€ ์ฐจ์„ธ๋Œ€ ๋ฐ˜๋„์ฒด ๊ธฐ์ˆ ๋กœ์„œ์˜ ๊ฐ€๋Šฅ์„ฑ์„ ์ง€๋‹ˆ๊ณ  ์žˆ์œผ๋ฉฐ, ๋‹ค์–‘ํ•œ ์‚ฐ์—… ๋ถ„์•ผ์—์„œ์˜ ์‘์šฉ์ด ๊ธฐ๋Œ€๋ฉ๋‹ˆ๋‹ค.

2. Components and Operating Principles

3D IC Design์˜ ๊ตฌ์„ฑ ์š”์†Œ์™€ ์šด์˜ ์›๋ฆฌ๋Š” ์—ฌ๋Ÿฌ ๋‹จ๊ณ„๋กœ ๋‚˜๋ˆŒ ์ˆ˜ ์žˆ์œผ๋ฉฐ, ๊ฐ ๊ตฌ์„ฑ ์š”์†Œ๋Š” ์„œ๋กœ ๊ธด๋ฐ€ํ•˜๊ฒŒ ์ƒํ˜ธ์ž‘์šฉํ•ฉ๋‹ˆ๋‹ค. ์ฃผ์š” ๊ตฌ์„ฑ ์š”์†Œ๋กœ๋Š” ํšŒ๋กœ ์ธต, TSV, ์ธํ„ฐ์ปค๋„ฅํŠธ, ๊ทธ๋ฆฌ๊ณ  ์—ด ๊ด€๋ฆฌ ์‹œ์Šคํ…œ์ด ์žˆ์Šต๋‹ˆ๋‹ค. ์ด๋Ÿฌํ•œ ์š”์†Œ๋“ค์€ 3D IC์˜ ์„ฑ๋Šฅ๊ณผ ํšจ์œจ์„ฑ์„ ๊ฒฐ์ •์ง“๋Š” ์ค‘์š”ํ•œ ์—ญํ• ์„ ํ•ฉ๋‹ˆ๋‹ค.

์ฒซ์งธ, ํšŒ๋กœ ์ธต์€ ๊ฐ๊ฐ์˜ ๊ธฐ๋Šฅ์„ ์ˆ˜ํ–‰ํ•˜๋Š” ๋…๋ฆฝ์ ์ธ ํšŒ๋กœ๋กœ ๊ตฌ์„ฑ๋ฉ๋‹ˆ๋‹ค. ๊ฐ ์ธต์€ ํŠน์ •ํ•œ ๊ธฐ๋Šฅ์„ ์ˆ˜ํ–‰ํ•˜๋ฉฐ, ์˜ˆ๋ฅผ ๋“ค์–ด, ํ•˜๋‚˜์˜ ์ธต์€ ํ”„๋กœ์„ธ์„œ ๊ธฐ๋Šฅ์„ ๋‹ด๋‹นํ•˜๊ณ  ๋‹ค๋ฅธ ์ธต์€ ๋ฉ”๋ชจ๋ฆฌ ๊ธฐ๋Šฅ์„ ๋‹ด๋‹นํ•  ์ˆ˜ ์žˆ์Šต๋‹ˆ๋‹ค. ์ด๋Ÿฌํ•œ ๋ฐฉ์‹์œผ๋กœ ํšŒ๋กœ๋ฅผ ๋ถ„๋ฆฌํ•จ์œผ๋กœ์จ, ๊ฐ ์ธต์˜ ์„ค๊ณ„๋ฅผ ์ตœ์ ํ™”ํ•  ์ˆ˜ ์žˆ์Šต๋‹ˆ๋‹ค.

๋‘˜์งธ, Through-Silicon Via (TSV)๋Š” 3D IC Design์˜ ํ•ต์‹ฌ์ ์ธ ์š”์†Œ์ž…๋‹ˆ๋‹ค. TSV๋Š” ์‹ค๋ฆฌ์ฝ˜ ๊ธฐํŒ์„ ํ†ต๊ณผํ•˜๋Š” ์ˆ˜์ง์  ์—ฐ๊ฒฐ๋กœ, ๊ฐ ์ธต ๊ฐ„์˜ ์‹ ํ˜ธ ์ „์†ก์„ ๊ฐ€๋Šฅํ•˜๊ฒŒ ํ•ฉ๋‹ˆ๋‹ค. TSV๋Š” ๋‚ฎ์€ ์ €ํ•ญ๊ณผ ๋†’์€ ๋Œ€์—ญํญ์„ ์ œ๊ณตํ•˜์—ฌ, ๋ฐ์ดํ„ฐ ์ „์†ก ์†๋„๋ฅผ ๊ทน๋Œ€ํ™”ํ•ฉ๋‹ˆ๋‹ค. ์ด๋กœ ์ธํ•ด, 3D IC๋Š” ๋ฐ์ดํ„ฐ ์ „์†ก์˜ ๋ณ‘๋ชฉ ํ˜„์ƒ์„ ์ค„์ผ ์ˆ˜ ์žˆ์Šต๋‹ˆ๋‹ค.

์…‹์งธ, ์ธํ„ฐ์ปค๋„ฅํŠธ๋Š” ๊ฐ ์ธต์˜ ํšŒ๋กœ๋ฅผ ์—ฐ๊ฒฐํ•˜๋Š” ์—ญํ• ์„ ํ•˜๋ฉฐ, ์‹ ํ˜ธ์˜ ์ „์†ก ๊ฒฝ๋กœ๋ฅผ ํ˜•์„ฑํ•ฉ๋‹ˆ๋‹ค. ์ด ๊ณผ์ •์—์„œ ์‹ ํ˜ธ์˜ ์ง€์—ฐ ์‹œ๊ฐ„์„ ์ตœ์†Œํ™”ํ•˜๊ณ , ์ „๋ ฅ ์†Œ๋น„๋ฅผ ์ค„์ด๋Š” ๊ฒƒ์ด ์ค‘์š”ํ•ฉ๋‹ˆ๋‹ค. ๋”ฐ๋ผ์„œ, ์ธํ„ฐ์ปค๋„ฅํŠธ ์„ค๊ณ„๋Š” 3D IC์˜ ์„ฑ๋Šฅ์— ํฐ ์˜ํ–ฅ์„ ๋ฏธ์น˜๋Š” ์š”์†Œ์ž…๋‹ˆ๋‹ค.

๋งˆ์ง€๋ง‰์œผ๋กœ, ์—ด ๊ด€๋ฆฌ ์‹œ์Šคํ…œ์€ 3D IC์˜ ์•ˆ์ •์„ฑ๊ณผ ์‹ ๋ขฐ์„ฑ์„ ํ™•๋ณดํ•˜๋Š” ๋ฐ ํ•„์ˆ˜์ ์ž…๋‹ˆ๋‹ค. ์—ฌ๋Ÿฌ ์ธต์ด ๊ฒน์ณ์ ธ ์žˆ๋Š” ๊ตฌ์กฐ๋กœ ์ธํ•ด ๋ฐœ์ƒํ•  ์ˆ˜ ์žˆ๋Š” ์—ด ๋ฌธ์ œ๋ฅผ ํ•ด๊ฒฐํ•˜๊ธฐ ์œ„ํ•ด, ํšจ๊ณผ์ ์ธ ์—ด ๋ถ„์‚ฐ ๊ธฐ์ˆ ์ด ํ•„์š”ํ•ฉ๋‹ˆ๋‹ค. ์ด๋ฅผ ํ†ตํ•ด, ํšŒ๋กœ์˜ ์„ฑ๋Šฅ ์ €ํ•˜๋ฅผ ๋ฐฉ์ง€ํ•˜๊ณ , ์ „์ฒด ์‹œ์Šคํ…œ์˜ ์‹ ๋ขฐ์„ฑ์„ ๋†’์ผ ์ˆ˜ ์žˆ์Šต๋‹ˆ๋‹ค.

2.1 (Optional) Subsections

2.1.1 Through-Silicon Via (TSV)

Through-Silicon Via๋Š” 3D IC Design์—์„œ ๊ฐ€์žฅ ์ค‘์š”ํ•œ ๊ธฐ์ˆ  ์ค‘ ํ•˜๋‚˜๋กœ, ์ „๊ธฐ์  ์‹ ํ˜ธ๋ฅผ ๊ฐ ์ธต ๊ฐ„์— ์ „๋‹ฌํ•˜๋Š” ์—ญํ• ์„ ํ•ฉ๋‹ˆ๋‹ค. TSV๋Š” ์ผ๋ฐ˜์ ์œผ๋กœ ์‹ค๋ฆฌ์ฝ˜ ๊ธฐํŒ์— ๊ตฌ๋ฉ์„ ๋šซ๊ณ , ๊ทธ ๊ตฌ๋ฉ์— ๊ธˆ์†์„ ์ฑ„์›Œ ๋„ฃ๋Š” ๋ฐฉ์‹์œผ๋กœ ์ œ์ž‘๋ฉ๋‹ˆ๋‹ค. ์ด ๊ณผ์ •์—์„œ TSV์˜ ์ง๊ฒฝ๊ณผ ๊นŠ์ด๋Š” ์„ค๊ณ„ ์š”๊ตฌ ์‚ฌํ•ญ์— ๋”ฐ๋ผ ๋‹ฌ๋ผ์ง€๋ฉฐ, ๋†’์€ ๋Œ€์—ญํญ๊ณผ ๋‚ฎ์€ ์ „๋ ฅ ์†Œ๋น„๋ฅผ ๋‹ฌ์„ฑํ•  ์ˆ˜ ์žˆ๋„๋ก ์ตœ์ ํ™”๋ฉ๋‹ˆ๋‹ค.

2.1.2 Thermal Management

3D IC์—์„œ ์—ด ๊ด€๋ฆฌ๋Š” ๋งค์šฐ ์ค‘์š”ํ•ฉ๋‹ˆ๋‹ค. ์—ฌ๋Ÿฌ ์ธต์ด ๊ฒน์ณ์ ธ ์žˆ์–ด ์—ด์ด ์ถ•์ ๋˜๊ธฐ ์‰ฌ์šด ๊ตฌ์กฐ์ด๊ธฐ ๋•Œ๋ฌธ์—, ํšจ๊ณผ์ ์ธ ์—ด ๋ถ„์‚ฐ ๊ธฐ์ˆ ์ด ํ•„์š”ํ•ฉ๋‹ˆ๋‹ค. ์ด๋ฅผ ์œ„ํ•ด ์—ฌ๋Ÿฌ ๊ฐ€์ง€ ์—ด ์ „๋„ ์žฌ๋ฃŒ์™€ ๊ตฌ์กฐ๊ฐ€ ์‚ฌ์šฉ๋˜๋ฉฐ, ์—ด ์ „๋„์„ฑ ๋ฌผ์งˆ์„ ์‚ฌ์šฉํ•˜์—ฌ ์—ด์„ ํšจ๊ณผ์ ์œผ๋กœ ๋ถ„์‚ฐ์‹œํ‚ค๋Š” ๋ฐฉ๋ฒ•์ด ์—ฐ๊ตฌ๋˜๊ณ  ์žˆ์Šต๋‹ˆ๋‹ค.

3D IC Design์€ ์—ฌ๋Ÿฌ ์œ ์‚ฌ ๊ธฐ์ˆ ๊ณผ ๋น„๊ต๋  ์ˆ˜ ์žˆ์œผ๋ฉฐ, ๊ฐ ๊ธฐ์ˆ ์˜ ํŠน์ง•๊ณผ ์žฅ๋‹จ์ , ์‹ค์ œ ์‘์šฉ ์‚ฌ๋ก€๋ฅผ ์‚ดํŽด๋ณด๋Š” ๊ฒƒ์ด ์ค‘์š”ํ•ฉ๋‹ˆ๋‹ค. ๊ฐ€์žฅ ๊ฐ€๊นŒ์šด ๊ธฐ์ˆ ๋กœ๋Š” 2D IC Design, System-in-Package (SiP), ๊ทธ๋ฆฌ๊ณ  Chiplet ๊ธฐ์ˆ ์ด ์žˆ์Šต๋‹ˆ๋‹ค.

2D IC Design์€ ์ „ํ†ต์ ์ธ ๋ฐฉ์‹์œผ๋กœ, ๋ชจ๋“  ํšŒ๋กœ๊ฐ€ ํ‰๋ฉด์ ์œผ๋กœ ๋ฐฐ์น˜๋ฉ๋‹ˆ๋‹ค. ์ด ๋ฐฉ์‹์€ ์ œ์ž‘์ด ๋น„๊ต์  ๊ฐ„๋‹จํ•˜๊ณ , ๋Œ€๋Ÿ‰ ์ƒ์‚ฐ์— ์œ ๋ฆฌํ•˜์ง€๋งŒ, ๊ณต๊ฐ„ ํ™œ์šฉ๋„๊ฐ€ ๋‚ฎ๊ณ , ์„ฑ๋Šฅ ํ•œ๊ณ„๊ฐ€ ์žˆ์Šต๋‹ˆ๋‹ค. ๋ฐ˜๋ฉด, 3D IC Design์€ ์ˆ˜์ง์  ๊ตฌ์กฐ๋กœ ์„ค๊ณ„๋˜์–ด ๊ณต๊ฐ„ ํ™œ์šฉ๋„๊ฐ€ ๋†’๊ณ , ์„ฑ๋Šฅ์„ ๊ทน๋Œ€ํ™”ํ•  ์ˆ˜ ์žˆ์Šต๋‹ˆ๋‹ค.

System-in-Package (SiP) ๊ธฐ์ˆ ์€ ์—ฌ๋Ÿฌ ๊ฐœ์˜ ์นฉ์„ ํ•˜๋‚˜์˜ ํŒจํ‚ค์ง€์— ํ†ตํ•ฉํ•˜๋Š” ๋ฐฉ์‹์ž…๋‹ˆ๋‹ค. SiP๋Š” 3D IC Design๊ณผ ์œ ์‚ฌํ•œ ์ ์ด ์žˆ์ง€๋งŒ, ์—ฌ๋Ÿฌ ๊ฐœ์˜ ๊ฐœ๋ณ„ ์นฉ์ด ์—ฌ์ „ํžˆ ์กด์žฌํ•˜์—ฌ, ๋ฐ์ดํ„ฐ ์ „์†ก ์†๋„์™€ ์„ฑ๋Šฅ์—์„œ ํ•œ๊ณ„๋ฅผ ๊ฐ€์งˆ ์ˆ˜ ์žˆ์Šต๋‹ˆ๋‹ค. 3D IC๋Š” ๋ชจ๋“  ํšŒ๋กœ๊ฐ€ ํ•˜๋‚˜์˜ ์‹ค๋ฆฌ์ฝ˜ ๊ธฐํŒ์— ํ†ตํ•ฉ๋˜์–ด ์žˆ์–ด, ๋” ๋‚˜์€ ์„ฑ๋Šฅ๊ณผ ํšจ์œจ์„ฑ์„ ์ œ๊ณตํ•ฉ๋‹ˆ๋‹ค.

Chiplet ๊ธฐ์ˆ ์€ ์—ฌ๋Ÿฌ ๊ฐœ์˜ ์ž‘์€ ์นฉ์„ ์กฐํ•ฉํ•˜์—ฌ ํ•˜๋‚˜์˜ ํฐ ์นฉ์ฒ˜๋Ÿผ ์ž‘๋™ํ•˜๋„๋ก ํ•˜๋Š” ๊ธฐ์ˆ ์ž…๋‹ˆ๋‹ค. ์ด ๊ธฐ์ˆ ์€ ์œ ์—ฐ์„ฑ๊ณผ ๋น„์šฉ ํšจ์œจ์„ฑ์—์„œ ์žฅ์ ์„ ๊ฐ€์ง€์ง€๋งŒ, 3D IC Design๊ณผ ๋น„๊ตํ–ˆ์„ ๋•Œ, ์‹ ํ˜ธ ์ „์†ก ์†๋„์™€ ์ „๋ ฅ ํšจ์œจ์„ฑ์—์„œ ์ฐจ์ด๋ฅผ ๋ณด์ž…๋‹ˆ๋‹ค. 3D IC๋Š” ๋” ๋†’์€ ๋Œ€์—ญํญ๊ณผ ๋‚ฎ์€ ์ „๋ ฅ ์†Œ๋น„๋ฅผ ์ œ๊ณตํ•˜์—ฌ, ๊ณ ์„ฑ๋Šฅ ์‘์šฉ ํ”„๋กœ๊ทธ๋žจ์— ์ ํ•ฉํ•ฉ๋‹ˆ๋‹ค.

์‹ค์ œ ์‘์šฉ ์‚ฌ๋ก€๋กœ๋Š” ๊ณ ์„ฑ๋Šฅ ์ปดํ“จํŒ…, ์ธ๊ณต์ง€๋Šฅ, ๋ชจ๋ฐ”์ผ ๊ธฐ๊ธฐ ๋ฐ IoT ์žฅ์น˜์—์„œ์˜ ์‚ฌ์šฉ์ด ์žˆ์Šต๋‹ˆ๋‹ค. ์ด๋Ÿฌํ•œ ๋ถ„์•ผ์—์„œ 3D IC Design์€ ์„ฑ๋Šฅ๊ณผ ํšจ์œจ์„ฑ์„ ๊ทน๋Œ€ํ™”ํ•˜์—ฌ, ์ฐจ์„ธ๋Œ€ ๊ธฐ์ˆ ๋กœ ์ž๋ฆฌ ์žก๊ณ  ์žˆ์Šต๋‹ˆ๋‹ค.

4. References

  • IEEE (Institute of Electrical and Electronics Engineers)
  • SEMI (Semiconductor Equipment and Materials International)
  • ITRS (International Technology Roadmap for Semiconductors)
  • Various semiconductor companies specializing in 3D IC technology, such as Intel, TSMC, and Samsung.

5. One-line Summary

3D IC Design์€ ๋ฐ˜๋„์ฒด ์ง‘์  ํšŒ๋กœ๋ฅผ ์ˆ˜์ง์ ์œผ๋กœ ํ†ตํ•ฉํ•˜์—ฌ ์„ฑ๋Šฅ๊ณผ ๋ฐ€๋„๋ฅผ ๊ทน๋Œ€ํ™”ํ•˜๋Š” ํ˜์‹ ์ ์ธ ๊ธฐ์ˆ ์ž…๋‹ˆ๋‹ค.