VLSI Wiki
Contents:
  1. Carrier Mobility
    1. 1. Definition: What is Carrier Mobility?
    2. 2. Components and Operating Principles
      1. 2.1 Temperature Dependence
      2. 2.2 Doping Concentration
    3. 3. Related Technologies and Comparison
    4. 4. References
    5. 5. One-line Summary

Carrier Mobility

1. Definition: What is Carrier Mobility?

Carrier Mobility๋Š” ๋ฐ˜๋„์ฒด ๋ฌผ์งˆ ๋‚ด์—์„œ ์ „ํ•˜ ์šด๋ฐ˜์ฒด(์ „์ž ๋ฐ ์ •๊ณต)๊ฐ€ ์ „๊ธฐ์žฅ์— ์˜ํ•ด ์ด๋™ํ•˜๋Š” ๋Šฅ๋ ฅ์„ ๋‚˜ํƒ€๋‚ด๋Š” ์ค‘์š”ํ•œ ๋ฌผ๋ฆฌ์  ํŠน์„ฑ์ž…๋‹ˆ๋‹ค. ์ด ๊ฐœ๋…์€ ์ „์ž๊ธฐ๊ธฐ์˜ ์„ฑ๋Šฅ, ํŠนํžˆ Digital Circuit Design์—์„œ ๋งค์šฐ ์ค‘์š”ํ•œ ์—ญํ• ์„ ํ•ฉ๋‹ˆ๋‹ค. Carrier Mobility๋Š” ์ „ํ•˜ ์šด๋ฐ˜์ฒด๊ฐ€ ํŠน์ • ๋ฌผ์งˆ์—์„œ ์–ผ๋งˆ๋‚˜ ๋น ๋ฅด๊ณ  ํšจ์œจ์ ์œผ๋กœ ์ด๋™ํ•  ์ˆ˜ ์žˆ๋Š”์ง€๋ฅผ ์ธก์ •ํ•˜๋ฉฐ, ์ด๋Š” ๋ฐ˜๋„์ฒด ์†Œ์ž์˜ ์ „๋„๋„ ๋ฐ ์Šค์œ„์นญ ์†๋„์— ์ง์ ‘์ ์ธ ์˜ํ–ฅ์„ ๋ฏธ์นฉ๋‹ˆ๋‹ค.

Carrier Mobility๋Š” ์ „ํ•˜ ์šด๋ฐ˜์ฒด๊ฐ€ ์ „๊ธฐ์žฅ์— ์˜ํ•ด ๊ฐ€์†๋  ๋•Œ์˜ ์†๋„์™€ ์ „๊ธฐ์žฅ ๊ฐ•๋„ ์‚ฌ์ด์˜ ๋น„์œจ๋กœ ์ •์˜๋ฉ๋‹ˆ๋‹ค. ์ผ๋ฐ˜์ ์œผ๋กœ ์ „์ž์— ๋Œ€ํ•œ Carrier Mobility๋Š” ฮผn์œผ๋กœ, ์ •๊ณต์— ๋Œ€ํ•œ Carrier Mobility๋Š” ฮผp๋กœ ํ‘œ๊ธฐ๋ฉ๋‹ˆ๋‹ค. ์ด๋Ÿฌํ•œ ์ด๋™๋„๋Š” ์˜จ๋„, ๋ถˆ์ˆœ๋ฌผ ๋†๋„, ๊ฒฐ์ • ๊ตฌ์กฐ ๋ฐ ์ „๊ธฐ์žฅ ๊ฐ•๋„์™€ ๊ฐ™์€ ์—ฌ๋Ÿฌ ์š”์ธ์— ์˜ํ•ด ์˜ํ–ฅ์„ ๋ฐ›์Šต๋‹ˆ๋‹ค. ์˜ˆ๋ฅผ ๋“ค์–ด, ์˜จ๋„๊ฐ€ ์ฆ๊ฐ€ํ•˜๋ฉด ๊ฒฉ์ž ์ง„๋™์ด ์‹ฌํ•ด์ ธ Carrier Mobility๊ฐ€ ๊ฐ์†Œํ•  ์ˆ˜ ์žˆ์Šต๋‹ˆ๋‹ค.

Carrier Mobility๋Š” VLSI ์„ค๊ณ„์—์„œ ๋งค์šฐ ์ค‘์š”ํ•œ ์š”์†Œ๋กœ, ์ด๋Š” ์†Œ์ž์˜ ์Šค์œ„์นญ ์†๋„์™€ ์ „๋ ฅ ์†Œ๋น„์— ํฐ ์˜ํ–ฅ์„ ๋ฏธ์น˜๊ธฐ ๋•Œ๋ฌธ์ž…๋‹ˆ๋‹ค. ๋†’์€ Carrier Mobility๋ฅผ ๊ฐ€์ง„ ๋ฐ˜๋„์ฒด ์žฌ๋ฃŒ๋Š” ๋” ๋น ๋ฅธ ์Šค์œ„์นญ ์†๋„๋ฅผ ์ œ๊ณตํ•˜์—ฌ ๊ณ ์† ๋””์ง€ํ„ธ ํšŒ๋กœ ์„ค๊ณ„์—์„œ ์œ ๋ฆฌํ•ฉ๋‹ˆ๋‹ค. ๋”ฐ๋ผ์„œ, ๋ฐ˜๋„์ฒด ์†Œ์ž์˜ ์„ฑ๋Šฅ์„ ๊ทน๋Œ€ํ™”ํ•˜๊ธฐ ์œ„ํ•ด์„œ๋Š” Carrier Mobility๋ฅผ ์ตœ์ ํ™”ํ•˜๋Š” ๊ฒƒ์ด ํ•„์ˆ˜์ ์ž…๋‹ˆ๋‹ค.

2. Components and Operating Principles

Carrier Mobility์˜ ๊ตฌ์„ฑ ์š”์†Œ์™€ ์ž‘๋™ ์›๋ฆฌ๋Š” ๋‹ค์Œ๊ณผ ๊ฐ™์€ ์—ฌ๋Ÿฌ ์š”์†Œ๋กœ ๋‚˜๋ˆŒ ์ˆ˜ ์žˆ์Šต๋‹ˆ๋‹ค. ์ฒซ ๋ฒˆ์งธ๋กœ, Carrier Mobility๋Š” ์ „ํ•˜ ์šด๋ฐ˜์ฒด์˜ ์ด๋™์„ ๋ฐฉํ•ดํ•˜๋Š” ๋‹ค์–‘ํ•œ ์š”์†Œ๋“ค์— ์˜ํ•ด ์˜ํ–ฅ์„ ๋ฐ›์Šต๋‹ˆ๋‹ค. ์ด๋Ÿฌํ•œ ์š”์†Œ์—๋Š” ๊ฒฐ์ • ๊ฒฐํ•จ, ๋ถˆ์ˆœ๋ฌผ, ๊ทธ๋ฆฌ๊ณ  ๊ฒฉ์ž ์ง„๋™ ๋“ฑ์ด ํฌํ•จ๋ฉ๋‹ˆ๋‹ค. ์ด๋“ค ์š”์†Œ๋Š” ์ „ํ•˜ ์šด๋ฐ˜์ฒด์˜ ์ด๋™ ๊ฒฝ๋กœ๋ฅผ ๋ฐฉํ•ดํ•˜๊ณ , ๊ฒฐ๊ณผ์ ์œผ๋กœ Carrier Mobility๋ฅผ ๊ฐ์†Œ์‹œํ‚ต๋‹ˆ๋‹ค.

Carrier Mobility๋ฅผ ์ดํ•ดํ•˜๊ธฐ ์œ„ํ•ด์„œ๋Š” ์ „ํ•˜ ์šด๋ฐ˜์ฒด๊ฐ€ ์ด๋™ํ•˜๋Š” ๋ฉ”์ปค๋‹ˆ์ฆ˜์„ ์‚ดํŽด๋ด์•ผ ํ•ฉ๋‹ˆ๋‹ค. ์ „ํ•˜ ์šด๋ฐ˜์ฒด๊ฐ€ ์ „๊ธฐ์žฅ์— ์˜ํ•ด ๊ฐ€์†๋  ๋•Œ, ์ด๋“ค์€ ๋ฌผ์งˆ์˜ ๊ฒฉ์ž ๊ตฌ์กฐ์™€ ์ƒํ˜ธ์ž‘์šฉํ•˜๊ฒŒ ๋ฉ๋‹ˆ๋‹ค. ์ด ๊ณผ์ •์—์„œ ์ „ํ•˜ ์šด๋ฐ˜์ฒด๋Š” ๊ฒฉ์ž ์ง„๋™์— ์˜ํ•ด ์‚ฐ๋ž€(scattering)๋˜๊ณ , ์ด๋Š” Carrier Mobility์— ์ง์ ‘์ ์ธ ์˜ํ–ฅ์„ ๋ฏธ์นฉ๋‹ˆ๋‹ค. ์‚ฐ๋ž€์€ ๋‘ ๊ฐ€์ง€ ์ฃผ์š” ํ˜•ํƒœ๋กœ ๋‚˜๋ˆŒ ์ˆ˜ ์žˆ์Šต๋‹ˆ๋‹ค: ๋ถˆ์ˆœ๋ฌผ ์‚ฐ๋ž€๊ณผ ๊ฒฉ์ž ์‚ฐ๋ž€์ž…๋‹ˆ๋‹ค. ๋ถˆ์ˆœ๋ฌผ ์‚ฐ๋ž€์€ ๋ฐ˜๋„์ฒด ๋‚ด์˜ ๋ถˆ์ˆœ๋ฌผ์ด ์ „ํ•˜ ์šด๋ฐ˜์ฒด์˜ ๊ฒฝ๋กœ๋ฅผ ๋ฐฉํ•ดํ•˜๋Š” ๊ฒฝ์šฐ๋ฅผ ์˜๋ฏธํ•˜๋ฉฐ, ๊ฒฉ์ž ์‚ฐ๋ž€์€ ์˜จ๋„ ๋ณ€ํ™”์— ๋”ฐ๋ฅธ ๊ฒฉ์ž ์ง„๋™์ด ์ „ํ•˜ ์šด๋ฐ˜์ฒด์˜ ์ด๋™์„ ๋ฐฉํ•ดํ•˜๋Š” ๊ฒฝ์šฐ๋ฅผ ์˜๋ฏธํ•ฉ๋‹ˆ๋‹ค.

Carrier Mobility์˜ ์ธก์ •์€ ์ผ๋ฐ˜์ ์œผ๋กœ Hall Effect ์ธก์ •์„ ํ†ตํ•ด ์ด๋ฃจ์–ด์ง‘๋‹ˆ๋‹ค. ์ด ๋ฐฉ๋ฒ•์€ ์ „ํ•˜ ์šด๋ฐ˜์ฒด์˜ ๋†๋„์™€ ์ด๋™๋„๋ฅผ ๋™์‹œ์— ์ธก์ •ํ•  ์ˆ˜ ์žˆ๋Š” ์œ ์šฉํ•œ ๋ฐฉ๋ฒ•์ž…๋‹ˆ๋‹ค. Hall Effect ์ธก์ • ์žฅ์น˜๋Š” ์ „๊ธฐ์žฅ๊ณผ ์ž๊ธฐ์žฅ์„ ๋™์‹œ์— ์ ์šฉํ•˜์—ฌ ์ „ํ•˜ ์šด๋ฐ˜์ฒด์˜ ์ด๋™ ๋ฐฉํ–ฅ๊ณผ ์†๋„๋ฅผ ๋ถ„์„ํ•ฉ๋‹ˆ๋‹ค. ์ด๋ฅผ ํ†ตํ•ด ์ „ํ•˜ ์šด๋ฐ˜์ฒด์˜ Carrier Mobility ๊ฐ’์„ ์ •ํ™•ํ•˜๊ฒŒ ๊ณ„์‚ฐํ•  ์ˆ˜ ์žˆ์Šต๋‹ˆ๋‹ค.

2.1 Temperature Dependence

์˜จ๋„์— ๋”ฐ๋ฅธ Carrier Mobility์˜ ๋ณ€ํ™”๋Š” ๋ฐ˜๋„์ฒด ์†Œ์ž์˜ ์„ฑ๋Šฅ์— ์ค‘์š”ํ•œ ์˜ํ–ฅ์„ ๋ฏธ์นฉ๋‹ˆ๋‹ค. ์ผ๋ฐ˜์ ์œผ๋กœ ์˜จ๋„๊ฐ€ ์ฆ๊ฐ€ํ•˜๋ฉด Carrier Mobility๋Š” ๊ฐ์†Œํ•˜๋Š” ๊ฒฝํ–ฅ์ด ์žˆ์Šต๋‹ˆ๋‹ค. ์ด๋Š” ๊ฒฉ์ž ์ง„๋™์ด ์ฆ๊ฐ€ํ•จ์— ๋”ฐ๋ผ ์ „ํ•˜ ์šด๋ฐ˜์ฒด๊ฐ€ ์‚ฐ๋ž€๋  ํ™•๋ฅ ์ด ๋†’์•„์ง€๊ธฐ ๋•Œ๋ฌธ์ž…๋‹ˆ๋‹ค. ๋”ฐ๋ผ์„œ, ๊ณ ์˜จ ํ™˜๊ฒฝ์—์„œ์˜ ์†Œ์ž ์„ฑ๋Šฅ ์ €ํ•˜๋ฅผ ๋ฐฉ์ง€ํ•˜๊ธฐ ์œ„ํ•ด์„œ๋Š” ์—ด ๊ด€๋ฆฌ ๊ธฐ์ˆ ์ด ํ•„์š”ํ•ฉ๋‹ˆ๋‹ค.

2.2 Doping Concentration

๋ถˆ์ˆœ๋ฌผ ๋†๋„๋„ Carrier Mobility์— ํฐ ์˜ํ–ฅ์„ ๋ฏธ์นฉ๋‹ˆ๋‹ค. ๋ถˆ์ˆœ๋ฌผ์ด ๋„ˆ๋ฌด ๋งŽ์ด ๋„ํ•‘๋˜๋ฉด ์ „ํ•˜ ์šด๋ฐ˜์ฒด๊ฐ€ ๋ถˆ์ˆœ๋ฌผ๊ณผ์˜ ์‚ฐ๋ž€์œผ๋กœ ์ธํ•ด ์ด๋™๋„๊ฐ€ ๊ฐ์†Œํ•  ์ˆ˜ ์žˆ์Šต๋‹ˆ๋‹ค. ๋ฐ˜๋ฉด, ์ ์ ˆํ•œ ๋†๋„์˜ ๋ถˆ์ˆœ๋ฌผ ๋„ํ•‘์€ Carrier Mobility๋ฅผ ํ–ฅ์ƒ์‹œํ‚ฌ ์ˆ˜ ์žˆ์Šต๋‹ˆ๋‹ค. ๋”ฐ๋ผ์„œ, ์ตœ์ ์˜ ๋„ํ•‘ ๋†๋„๋ฅผ ์ฐพ๋Š” ๊ฒƒ์ด ์ค‘์š”ํ•ฉ๋‹ˆ๋‹ค.

Carrier Mobility๋Š” ๋‹ค์–‘ํ•œ ๋ฐ˜๋„์ฒด ๊ธฐ์ˆ ๊ณผ ๋ฐ€์ ‘ํ•˜๊ฒŒ ์—ฐ๊ด€๋˜์–ด ์žˆ์œผ๋ฉฐ, ๋‹ค๋ฅธ ๊ธฐ์ˆ ๋“ค๊ณผ ๋น„๊ตํ•  ๋•Œ ๋ช‡ ๊ฐ€์ง€ ์ค‘์š”ํ•œ ํŠน์ง•์ด ์žˆ์Šต๋‹ˆ๋‹ค. ์˜ˆ๋ฅผ ๋“ค์–ด, Carrier Mobility๋Š” MOSFET(Metal-Oxide-Semiconductor Field-Effect Transistor)์™€ ๊ฐ™์€ ์†Œ์ž์˜ ์„ฑ๋Šฅ์„ ๊ฒฐ์ •์ง“๋Š” ์ฃผ์š” ์š”์†Œ์ž…๋‹ˆ๋‹ค. MOSFET์˜ ๊ฒฝ์šฐ, ๋†’์€ Carrier Mobility๋Š” ๋” ๋น ๋ฅธ ์Šค์œ„์นญ ์†๋„์™€ ๋‚ฎ์€ ์ „๋ ฅ ์†Œ๋ชจ๋ฅผ ๊ฐ€๋Šฅํ•˜๊ฒŒ ํ•ฉ๋‹ˆ๋‹ค.

๋ฐ˜๋ฉด, SiC(Silicon Carbide)์™€ GaN(Gallium Nitride)๊ณผ ๊ฐ™์€ wide bandgap ๋ฐ˜๋„์ฒด๋Š” ๋†’์€ Carrier Mobility๋ฅผ ์ œ๊ณตํ•˜์—ฌ ๊ณ ์˜จ ๋ฐ ๊ณ ์ „์•• ํ™˜๊ฒฝ์—์„œ๋„ ๋›ฐ์–ด๋‚œ ์„ฑ๋Šฅ์„ ๋ฐœํœ˜ํ•ฉ๋‹ˆ๋‹ค. ์ด์™€ ๊ฐ™์€ wide bandgap ๋ฐ˜๋„์ฒด๋Š” ์ „ํ†ต์ ์ธ ์‹ค๋ฆฌ์ฝ˜ ๋ฐ˜๋„์ฒด๋ณด๋‹ค ๋” ๋†’์€ ์ „์••๊ณผ ์˜จ๋„์—์„œ ์ž‘๋™ํ•  ์ˆ˜ ์žˆ์–ด, ์ „๋ ฅ ์ „์ž ์žฅ์น˜ ๋ฐ RF(Radio Frequency) ์‘์šฉ ๋ถ„์•ผ์—์„œ ์ ์  ๋” ๋งŽ์ด ์‚ฌ์šฉ๋˜๊ณ  ์žˆ์Šต๋‹ˆ๋‹ค.

Carrier Mobility๋Š” ๋˜ํ•œ ์ „์ž๊ธฐ๊ธฐ ์„ค๊ณ„์—์„œ์˜ ์ „๋ ฅ ํšจ์œจ์„ฑ์„ ๋†’์ด๋Š” ๋ฐ ์ค‘์š”ํ•œ ์—ญํ• ์„ ํ•ฉ๋‹ˆ๋‹ค. ์˜ˆ๋ฅผ ๋“ค์–ด, ๋†’์€ Carrier Mobility๋ฅผ ๊ฐ€์ง„ ์žฌ๋ฃŒ๋Š” ๋” ๋‚ฎ์€ ์ „๋ ฅ ์†Œ๋ชจ๋กœ ๋” ๋†’์€ ์„ฑ๋Šฅ์„ ์ œ๊ณตํ•  ์ˆ˜ ์žˆ์œผ๋ฉฐ, ์ด๋Š” ๋ชจ๋ฐ”์ผ ๊ธฐ๊ธฐ ๋ฐ IoT(Internet of Things) ์žฅ์น˜์˜ ๋ฐฐํ„ฐ๋ฆฌ ์ˆ˜๋ช…์„ ์—ฐ์žฅํ•˜๋Š” ๋ฐ ๊ธฐ์—ฌํ•ฉ๋‹ˆ๋‹ค.

4. References

  • IEEE (Institute of Electrical and Electronics Engineers)
  • IEDM (International Electron Devices Meeting)
  • SEMI (Semiconductor Equipment and Materials International)
  • AIP (American Institute of Physics)

5. One-line Summary

Carrier Mobility๋Š” ๋ฐ˜๋„์ฒด ๋‚ด ์ „ํ•˜ ์šด๋ฐ˜์ฒด์˜ ์ด๋™ ๋Šฅ๋ ฅ์„ ์ธก์ •ํ•˜๋ฉฐ, ์ด๋Š” Digital Circuit Design ๋ฐ VLSI ์„ค๊ณ„์—์„œ ์„ฑ๋Šฅ ์ตœ์ ํ™”์— ํ•„์ˆ˜์ ์ธ ์š”์†Œ์ž…๋‹ˆ๋‹ค.